ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals
fem finite-elements piezo finite-element-analysis multiphysics fea silicon mems finite-element-methods ansys thin-film piezoelectric zno piezo-sensor pzt piezoelectric-materials piezoelectric-sensors aln silizium vibrit
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Updated
Jan 12, 2025 - Roff